Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7221176 | Vacuum prober and vacuum probe method | Kiyoshi Takekoshi, Shinjiro Watanabe | 2007-05-22 |
| 7106082 | Stage driving apparatus and probe method | — | 2006-09-12 |
| 6933736 | Prober | Masahito Kobayashi, Takafumi Fujita | 2005-08-23 |
| 6927587 | Probe apparatus | — | 2005-08-09 |
| 6850052 | Probing method | Shinji Iino | 2005-02-01 |
| 6634245 | Drivingly rotatable mechanism of specimen loading table and specimen loading mechanism | Shinji Iino, Yutaka Akaike, Masaru Suzuki | 2003-10-21 |
| 6262570 | Probe apparatus | Yutaka Akaike, Chiaki Mochizuki, Isao Kono | 2001-07-17 |
| 6140828 | Prober and probe method | Shinji Iino | 2000-10-31 |
| 5912555 | Probe apparatus | Yutaka Akaike, Chiaki Mochizuki, Isao Kono | 1999-06-15 |
| 5804983 | Probe apparatus with tilt correction mechanisms | Hisashi Nakajima | 1998-09-08 |
| D383683 | Wafer prober | Osamu Kamata, Masahiko Sugiyama, Munetoshi Nagasaka, Kazumi Yamagata | 1997-09-16 |
| 5642056 | Probe apparatus for correcting the probe card posture before testing | Hisashi Nakajima | 1997-06-24 |
| 5640101 | Probe system and probe method | Motohiro Kuji, Shinji Akaike, Shigeaki Takahashi | 1997-06-17 |
| 5585738 | Probe system having vertical height detection and double focal image pickup coinciding with probe contact in height adjustment | Motohiro Kuji, Shinji Akaike, Shigeaki Takahashi | 1996-12-17 |
| 4812201 | Method of ashing layers, and apparatus for ashing layers | Hiroyuki Sakai, Kazutoshi Yoshioka, Kimiharu Matsumura, Keisuke Shigaki, Yutaka Amemiya +2 more | 1989-03-14 |