Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10310010 | Probe apparatus and probe method | Muneaki Tamura, Kenta Saiki, Kazuhiko Koshimizu, Isao Okazaki, Mitsuya Kawatsuki +1 more | 2019-06-04 |
| 10074192 | Substrate inspection apparatus and control method thereof | Kenta Saiki | 2018-09-11 |
| 10006941 | Position accuracy inspecting method, position accuracy inspecting apparatus, and position inspecting unit | Kenta Saiki, Toshihiko Tanaka, Muneaki Tamura, Kazuhiko Koshimizu | 2018-06-26 |
| 5777485 | Probe method and apparatus with improved probe contact | Hideaki Tanaka, Yoshihito Marumo | 1998-07-07 |
| 5640101 | Probe system and probe method | Motohiro Kuji, Haruhiko Yoshioka, Shigeaki Takahashi | 1997-06-17 |
| 5585738 | Probe system having vertical height detection and double focal image pickup coinciding with probe contact in height adjustment | Motohiro Kuji, Haruhiko Yoshioka, Shigeaki Takahashi | 1996-12-17 |