Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11639947 | Method of detecting foreign object on stage and detection apparatus | Takuya Ishida | 2023-05-02 |
| 10310010 | Probe apparatus and probe method | Muneaki Tamura, Shinji Akaike, Kazuhiko Koshimizu, Isao Okazaki, Mitsuya Kawatsuki +1 more | 2019-06-04 |
| 10074192 | Substrate inspection apparatus and control method thereof | Shinji Akaike | 2018-09-11 |
| 10006941 | Position accuracy inspecting method, position accuracy inspecting apparatus, and position inspecting unit | Toshihiko Tanaka, Muneaki Tamura, Kazuhiko Koshimizu, Shinji Akaike | 2018-06-26 |