Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381090 | Etching method and etching apparatus | Toshinori Debari, Teppei Okumura, Woonghyun Jeung, Kenshiro ASAHI, Hiroyuki Abe +1 more | 2025-08-05 |
| 11548804 | Method and apparatus for processing oxygen-containing workpiece | Yasuo Nakatani, Keiko Hada | 2023-01-10 |
| 11127597 | Etching method | Satoshi TODA, Takuya Abe, Tsuhung Huang, Yoshie OZAWA, Ken NAKAGOMI +2 more | 2021-09-21 |
| 10964546 | Substrate processing method and method for removing boron-doped silicon | Tsuhung Huang, Teppei Okumura | 2021-03-30 |
| 8282984 | Processing condition inspection and optimization method of damage recovery process, damage recovering system and storage medium | Jun Tamura, Shigeru Tahara | 2012-10-09 |
| 8026150 | Semiconductor device manufacturing method and storage medium | Jun Tamura, Shigeru Tahara | 2011-09-27 |