Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237173 | Substrate processing method, substrate processing apparatus and substrate processing system | Akitaka Shimizu, Koichi Nagakura, Mitsuhiro Tachibana | 2025-02-25 |
| 11557493 | Substrate cleaning apparatus and substrate cleaning method | Toshimitsu Sakai | 2023-01-17 |
| 11548804 | Method and apparatus for processing oxygen-containing workpiece | Reiko SASAHARA, Yasuo Nakatani | 2023-01-10 |
| 10903083 | Substrate processing method, substrate processing apparatus and substrate processing system | Akitaka Shimizu, Koichi Nagakura, Mitsuhiro Tachibana | 2021-01-26 |
| 10213076 | Particle collecting apparatus and particle collecting method | Nobuhiro Takahashi | 2019-02-26 |
| 6617095 | Evaluating method of hydrophobic process, forming method of resist pattern, and forming system of resist pattern | Junichi Kitano, Yuko Ono, Takayuki Katano, Hidefumi Matsui | 2003-09-09 |