Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127597 | Etching method | Reiko SASAHARA, Satoshi TODA, Takuya Abe, Yoshie OZAWA, Ken NAKAGOMI +2 more | 2021-09-21 |
| 10964546 | Substrate processing method and method for removing boron-doped silicon | Reiko SASAHARA, Teppei Okumura | 2021-03-30 |
| 10734243 | Etching method and substrate processing system | Jun LIN, Takehiko Orii | 2020-08-04 |