Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381096 | Etching method and etching apparatus | Yoshiki Igarashi, Satoru KIKUSHIMA, Takayuki Suga, Chengya Chu | 2025-08-05 |
| 11791175 | Etching method and etching apparatus | Yoshiki Igarashi, Satoru KIKUSHIMA, Takayuki Suga, Chengya Chu | 2023-10-17 |
| 11282714 | Etching method and etching device | Akifumi Yao, Kunihiro Yamauchi, Tatsuo Miyazaki, Susumu YAMAUCHI, Kazuaki Nishimura | 2022-03-22 |
| 11189498 | Method of etching silicon-containing film, computer-readable storage medium, and apparatus for etching silicon-containing film | Takehiko Orii, Yasuo ASADA, Ayano HAGIWARA, Shinji Irie, Kenji Tanouchi +1 more | 2021-11-30 |
| 10998199 | Etching method and etching apparatus | Susumu YAMAUCHI | 2021-05-04 |
| 10734243 | Etching method and substrate processing system | Tsuhung Huang, Takehiko Orii | 2020-08-04 |
| 10734242 | Substrate processing method and substrate processing apparatus | Kazuaki Nishimura, Koji Takeya | 2020-08-04 |
| 10460946 | Naturally oxidized film removing method and naturally oxidized film removing device | Koji Takeya, Shinichi Kawaguchi, Mitsuhiro Tachibana, Akifumi Yao, Kunihiro Yamauchi | 2019-10-29 |
| 10199268 | Film forming method and film forming system | Susumu YAMAUCHI, Kazuaki Nishimura, Toshio Hasegawa | 2019-02-05 |
| 9991138 | Etching method and etching apparatus | Koji Takeya, Mitsuhiro Tachibana, Akifumi Yao, Kunihiro Yamauchi, Tatsuo Miyazaki | 2018-06-05 |
| 8263432 | Material composition having core-shell microstructure used for varistor | Ching-Hohn Lien, Cheng-Tsung Kuo, Jie Zhu, Li Zhang, Wei-Cheng Lien | 2012-09-11 |
| 8163174 | Submerged biofiltration purifying apparatus | — | 2012-04-24 |