Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734242 | Substrate processing method and substrate processing apparatus | Kazuaki Nishimura, Jun LIN | 2020-08-04 |
| 10460946 | Naturally oxidized film removing method and naturally oxidized film removing device | Jun LIN, Shinichi Kawaguchi, Mitsuhiro Tachibana, Akifumi Yao, Kunihiro Yamauchi | 2019-10-29 |
| 10312079 | Etching method | Kazuaki Nishimura, Nobuhiro Takahashi, Junichiro MATSUNAGA | 2019-06-04 |
| 9991138 | Etching method and etching apparatus | Jun LIN, Mitsuhiro Tachibana, Akifumi Yao, Kunihiro Yamauchi, Tatsuo Miyazaki | 2018-06-05 |
| 9607855 | Etching method and storage medium | Nobuhiro Takahashi, Masashi Matsumoto, Ayano HAGIWARA, Junichiro MATSUNAGA | 2017-03-28 |
| 7554095 | Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate | Takashi Fuse, Tadashi Kotsugi, Kyo Tsuboi | 2009-06-30 |
| 7550739 | Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate | Takashi Fuse, Tadashi Kotsugi, Kyo Tsuboi | 2009-06-23 |
| 7521687 | Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate | Takashi Fuse, Tadashi Kotsugi, Kyo Tsuboi | 2009-04-21 |
| 5262182 | Breadmaking dough conditioner | Akira Kasahara, Hiroshi Takeshima, Ryuji Uemura | 1993-11-16 |