Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12054824 | Substrate processing method and substrate processing apparatus | Nobuhiro Takahashi, Kiyotaka Horikawa | 2024-08-06 |
| 11342192 | Substrate processing method and storage medium | Nobuhiro Takahashi, Yasuo ASADA | 2022-05-24 |
| 10312079 | Etching method | Koji Takeya, Kazuaki Nishimura, Nobuhiro Takahashi | 2019-06-04 |
| 9691630 | Etching method | Nobuhiro Takahashi, Tetsuro Takahashi, Shuji Moriya, Masashi Matsumoto | 2017-06-27 |
| 9607855 | Etching method and storage medium | Nobuhiro Takahashi, Masashi Matsumoto, Ayano HAGIWARA, Koji Takeya | 2017-03-28 |