Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373874 | Etching method and apparatus | Nobuhiro Takahashi, Yasuo ASADA, Tatsuya Yamaguchi | 2022-06-28 |
| 11189498 | Method of etching silicon-containing film, computer-readable storage medium, and apparatus for etching silicon-containing film | Takehiko Orii, Yasuo ASADA, Jun LIN, Shinji Irie, Kenji Tanouchi +1 more | 2021-11-30 |
| 10665470 | Etching method and etching apparatus | Yasuo ASADA, Takehiko Orii, Shinji Irie, Nobuhiro Takahashi, Tatsuya Yamaguchi | 2020-05-26 |
| 9607855 | Etching method and storage medium | Nobuhiro Takahashi, Masashi Matsumoto, Koji Takeya, Junichiro MATSUNAGA | 2017-03-28 |