Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784054 | Etching method and substrate processing system | Nobuhiro Takahashi, Kazuhito Miyata | 2023-10-10 |
| 11373874 | Etching method and apparatus | Nobuhiro Takahashi, Ayano HAGIWARA, Tatsuya Yamaguchi | 2022-06-28 |
| 11342192 | Substrate processing method and storage medium | Nobuhiro Takahashi, Junichiro MATSUNAGA | 2022-05-24 |
| 11189498 | Method of etching silicon-containing film, computer-readable storage medium, and apparatus for etching silicon-containing film | Takehiko Orii, Jun LIN, Ayano HAGIWARA, Shinji Irie, Kenji Tanouchi +1 more | 2021-11-30 |
| 11011383 | Etching method | Takehiko Orii, Nobuhiro Takahashi | 2021-05-18 |
| 10665470 | Etching method and etching apparatus | Takehiko Orii, Shinji Irie, Nobuhiro Takahashi, Ayano HAGIWARA, Tatsuya Yamaguchi | 2020-05-26 |