Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387940 | Dry etching method | Shoi SUZUKI | 2025-08-12 |
| 12371618 | Dry etching method, method for producing semiconductor device, and dry etching gas composition | Ryosuke Sawamura, Shoi SUZUKI, Hiroyuki Oomori | 2025-07-29 |
| 12308244 | Dry etching method, method for producing semiconductor device, and etching device | Kunihiro Yamauchi, Hikaru KITAYAMA | 2025-05-20 |
| 12145857 | Method for producing tungsten hexafluoride | Akiou Kikuchi, Yuta Takeda, Masakiyo NAGATOMO | 2024-11-19 |
| 12125709 | Method and device for etching silicon oxide | Shoi SUZUKI | 2024-10-22 |
| 11715641 | Method and device for etching silicon oxide | Shoi SUZUKI | 2023-08-01 |
| 11658278 | Carbon black for batteries, coating liquid for batteries, positive electrode for nonaqueous batteries and nonaqueous battery | Shinichiro Osumi, Tatsuya Nagai, Takako ARAI, Tetsuya Ito, Hiroyuki Oomori +1 more | 2023-05-23 |
| 11618954 | Dry etching method, method for manufacturing semiconductor device, and etching device | Yuuta Takeda, Kunihiro Yamauchi | 2023-04-04 |
| 11566177 | Dry etching agent, dry etching method and method for producing semiconductor device | Hiroyuki Oomori, Takashi Kashiwaba | 2023-01-31 |
| 11519557 | Method for manufacturing filled container, and filled container | Masakiyo NAGATOMO, Shinya Ikeda | 2022-12-06 |
| 11447697 | Substrate processing gas, storage container, and substrate processing method | Yuuta Takeda, Jun Eto | 2022-09-20 |
| 11359278 | Treatment method and cleaning method for metal oxyfluorides | Masakiyo NAGATOMO | 2022-06-14 |
| 11335573 | Dry etching method and β-diketone-filled container | Kunihiro Yamauchi, Takashi Masuda | 2022-05-17 |
| 11289340 | Dry etching method | Shoi SUZUKI | 2022-03-29 |
| 11282714 | Etching method and etching device | Kunihiro Yamauchi, Tatsuo Miyazaki, Jun LIN, Susumu YAMAUCHI, Kazuaki Nishimura | 2022-03-22 |
| 11049729 | Dry etching method, semiconductor device manufacturing method, and chamber cleaning method | Shoi SUZUKI | 2021-06-29 |
| 10957554 | Etching method and etching device | Kunihiro Yamauchi, Takashi Masuda | 2021-03-23 |
| 10926211 | Method for purifying fluorine compound gas | Kohei Ooya, Yuta Takeda, Jun Eto | 2021-02-23 |
| 10872780 | Dry etching agent composition and dry etching method | Hiroyuki Oomori, Isamu Mori | 2020-12-22 |
| 10741406 | Dry etching method | Hiroyuki Oomori | 2020-08-11 |
| 10460946 | Naturally oxidized film removing method and naturally oxidized film removing device | Jun LIN, Koji Takeya, Shinichi Kawaguchi, Mitsuhiro Tachibana, Kunihiro Yamauchi | 2019-10-29 |
| 10457866 | Dry etching gas and dry etching method | Yosuke Nakamura, Masaki Fujiwara, Hiroyuki Oomori | 2019-10-29 |
| 9991138 | Etching method and etching apparatus | Jun LIN, Koji Takeya, Mitsuhiro Tachibana, Kunihiro Yamauchi, Tatsuo Miyazaki | 2018-06-05 |
| 9929021 | Dry etching method and dry etching agent | Hiroyuki Oomori | 2018-03-27 |
| 9708720 | Gas generation device | Akiou Kikuchi | 2017-07-18 |