Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11618954 | Dry etching method, method for manufacturing semiconductor device, and etching device | Kunihiro Yamauchi, Akifumi Yao | 2023-04-04 |
| 11447697 | Substrate processing gas, storage container, and substrate processing method | Akifumi Yao, Jun Eto | 2022-09-20 |