Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387940 | Dry etching method | Akifumi Yao | 2025-08-12 |
| 12371618 | Dry etching method, method for producing semiconductor device, and dry etching gas composition | Ryosuke Sawamura, Hiroyuki Oomori, Akifumi Yao | 2025-07-29 |
| 12125709 | Method and device for etching silicon oxide | Akifumi Yao | 2024-10-22 |
| 11715641 | Method and device for etching silicon oxide | Akifumi Yao | 2023-08-01 |
| 11658278 | Carbon black for batteries, coating liquid for batteries, positive electrode for nonaqueous batteries and nonaqueous battery | Shinichiro Osumi, Tatsuya Nagai, Takako ARAI, Tetsuya Ito, Hiroyuki Oomori +1 more | 2023-05-23 |
| 11594417 | Etching method and apparatus | Kazuhito Miyata, Nobuhiro Takahashi, Takehiko Orii, Shunta Furutani | 2023-02-28 |
| 11289340 | Dry etching method | Akifumi Yao | 2022-03-29 |
| 11251051 | Dry etching method | Hiroyuki Oomori | 2022-02-15 |
| 11049729 | Dry etching method, semiconductor device manufacturing method, and chamber cleaning method | Akifumi Yao | 2021-06-29 |
| 5390059 | Flying head slider supporting mechanism having active air pressure control | Mikio Tokuyama, Yuzo Yamaguchi, Katsuaki Kikuchi, Kousaku Wakatasuki, Yoshinori Takeuchi | 1995-02-14 |