Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371618 | Dry etching method, method for producing semiconductor device, and dry etching gas composition | Shoi SUZUKI, Hiroyuki Oomori, Akifumi Yao | 2025-07-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371618 | Dry etching method, method for producing semiconductor device, and dry etching gas composition | Shoi SUZUKI, Hiroyuki Oomori, Akifumi Yao | 2025-07-29 |