Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154791 | Dry etching method and method for producing semiconductor device | Hiroyuki Oomori | 2024-11-26 |
| 11594417 | Etching method and apparatus | Kazuhito Miyata, Nobuhiro Takahashi, Takehiko Orii, Shoi SUZUKI | 2023-02-28 |