Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417922 | Surface treatment method, dry etching method, cleaning method, semiconductor device manufacturing method, and etching device | Hikaru KITAYAMA, Kunihiro Yamauchi | 2025-09-16 |
| 12378659 | Metal material, method of producing metal material, method of passivating semiconductor processing apparatus, method of manufacturing semiconductor device, and method of manufacturing filled container | Ryoma Nomura, Ryota Yoshimura | 2025-08-05 |
| 12145857 | Method for producing tungsten hexafluoride | Yuta Takeda, Masakiyo NAGATOMO, Akifumi Yao | 2024-11-19 |
| 10156012 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium | Kenji Kameda, Masaya NAGATO, Yuta Takeda, Kunihiro Yamauchi | 2018-12-18 |
| 10153153 | Method for removing adhering matter and dry etching method | Masanori Watari, Kenji Kameda, Shin Hiyama, Yasutoshi TSUBOTA | 2018-12-11 |
| 9852914 | Sacrificial-film removal method and substrate processing device | Manabu OKUTANI, Tomonori Umezaki | 2017-12-26 |
| 9728422 | Dry etching method | Hiroyuki Oomori | 2017-08-08 |
| 9708720 | Gas generation device | Akifumi Yao | 2017-07-18 |
| 9676626 | IF7-derived iodine fluoride compound recovery method and recovery device | Masanori Watari | 2017-06-13 |
| 9524877 | Silicon dry etching method | Isamu Mori, Masanori Watari | 2016-12-20 |
| 9238872 | Method for synthesizing fluorine compound by electrolysis and electrode therefor | Isamu Mori, Akifumi Yao, Masaaki Yonekura, Hiroshi Horiuchi | 2016-01-19 |
| 9230821 | Dry etching agent and dry etching method using the same | Yasuo Hibino, Tomonori Umezaki, Isamu Mori, Satoru Okamoto | 2016-01-05 |
| 9097688 | Method and device for measuring water content in hydrogen fluoride-containing fluoride salt compounds | Nobuyuki Tokunaga | 2015-08-04 |
| 9093388 | Dry etching agent and dry etching method using the same | Yasuo Hibino, Tomonori Umezaki, Isamu Mori, Satoru Okamoto | 2015-07-28 |
| 9082725 | Pattern forming method | Masahiro Kimura, Tomonori Umezaki | 2015-07-14 |
| 9017571 | Dry etching agent and dry etching method | Tomonori Umezaki, Yasuo Hibino, Isamu Mori, Satoru Okamoto | 2015-04-28 |
| 8864961 | Fluorine gas generating apparatus | Akifumi Yao, Tatsuo Miyazaki, Nobuyuki Tokunaga | 2014-10-21 |
| 8105566 | Method for producing oxygen-containing halogenated fluoride | Isamu Mori | 2012-01-31 |