Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12325934 | Single-crystal silicon carbide wafer, and single-crystal silicon carbide ingot | Kazuto Kumagai | 2025-06-10 |
| 12325935 | Single-crystal silicon carbide wafer, single-crystal silicon carbide ingot, and method for producing single-crystal silicon carbide | Kazuto Kumagai, Gaku Kono | 2025-06-10 |
| 11643748 | Silicon carbide single crystal | Kazuto Kumagai | 2023-05-09 |
| 10151046 | Method for producing crystal of silicon carbide, and crystal production device | Toru Ujihara, Shunta HARADA, Daiki Koike | 2018-12-11 |
| 9852914 | Sacrificial-film removal method and substrate processing device | Manabu OKUTANI, Akiou Kikuchi | 2017-12-26 |
| 9230821 | Dry etching agent and dry etching method using the same | Yasuo Hibino, Akiou Kikuchi, Isamu Mori, Satoru Okamoto | 2016-01-05 |
| 9165776 | Dry etching method | Isamu Mori | 2015-10-20 |
| 9093388 | Dry etching agent and dry etching method using the same | Yasuo Hibino, Akiou Kikuchi, Isamu Mori, Satoru Okamoto | 2015-07-28 |
| 9082725 | Pattern forming method | Masahiro Kimura, Akiou Kikuchi | 2015-07-14 |
| 9017571 | Dry etching agent and dry etching method | Yasuo Hibino, Isamu Mori, Satoru Okamoto, Akiou Kikuchi | 2015-04-28 |
| 8562751 | Dry cleaning method of substrate processing apparatus | Isao Gunji, Yusaku Izawa, Hitoshi Itoh, Yuta Takeda, Isamu Mori | 2013-10-22 |