Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12042813 | Substrate processing method and substrate processing apparatus | Hiroshi Abe, Takashi Ota, Takaaki ISHIZU, Kenji Kobayashi, Ryo MURAMOTO +2 more | 2024-07-23 |
| 12046465 | Substrate treatment method and substrate treatment apparatus | — | 2024-07-23 |
| 11901173 | Substrate processing method | Yukifumi YOSHIDA, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2024-02-13 |
| 11676834 | Substrate processing method and substrate processing apparatus | Tsutomu OSUKA, Katsuei HIGASHI, Hiroshi Abe, Naohiko YOSHIHARA | 2023-06-13 |
| 11524314 | Substrate processing method and substrate processing device | Hiroshi Abe, Takaaki ISHIZU | 2022-12-13 |
| 11469117 | Substrate processing apparatus, and substrate processing method | Yasunori Kanematsu, Hitoshi Nakai | 2022-10-11 |
| 11465167 | Substrate treatment apparatus | Hiroshi Abe, Takashi Ota, Naohiko YOSHIHARA | 2022-10-11 |
| 11404292 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Hiroshi Abe, Shuichi Yasuda, Yasunori Kanematsu, Hitoshi Nakai | 2022-08-02 |
| 11335587 | Substrate processing apparatus and substrate processing meihod | Takashi Ota, Hiroshi Abe | 2022-05-17 |
| 11302525 | Substrate processing method and substrate processing apparatus | Hiroaki Takahashi, Masayuki OTSUJI, Hiroshi Abe, Chikara MAEDA, Hitoshi Nakai +1 more | 2022-04-12 |
| 11289324 | Substrate treatment method and substrate treatment apparatus | — | 2022-03-29 |
| 11260431 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2022-03-01 |
| 11217441 | Substrate treatment method and substrate treatment apparatus | Kenji Kobayashi | 2022-01-04 |
| 11211241 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2021-12-28 |
| 11177124 | Substrate processing method and substrate processing apparatus | Hiroshi Abe | 2021-11-16 |
| 11152204 | Substrate processing method and substrate processing apparatus | Hitoshi Nakai, Tsutomu OSUKA, Naohiko YOSHIHARA, Yasunori Kanematsu, Kenji AMAHISA +1 more | 2021-10-19 |
| 11139180 | Substrate processing apparatus and substrate processing method | Naohiko YOSHIHARA, Kenji Kobayashi | 2021-10-05 |
| 11101147 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Hiroaki Takahashi, Masayuki OTSUJI, Chikara MAEDA, Hiroshi Abe +2 more | 2021-08-24 |
| 10964526 | Substrate processing method | Kenji Kobayashi, Naohiko YOSHIHARA | 2021-03-30 |
| 10921057 | Substrate drying method and substrate processing apparatus | Noriyuki KIKUMOTO, Naohiko YOSHIHARA, Hiroshi Abe | 2021-02-16 |
| 10825713 | Substrate processing apparatus and substrate processing method | Naohiko YOSHIHARA, Kenji Kobayashi | 2020-11-03 |
| 10792712 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2020-10-06 |
| 10760852 | Substrate drying method and substrate processing apparatus | Noriyuki KIKUMOTO, Naohiko YOSHIHARA, Hiroshi Abe | 2020-09-01 |
| 10755916 | Substrate treatment method and substrate treatment apparatus | Hiroshi Abe, Takashi Ota | 2020-08-25 |
| 10734271 | Substrate processing apparatus and substrate processing method | Takashi Ota, Hiroshi Abe | 2020-08-04 |