Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431369 | Substrate processing apparatus | Shuhei NEMOTO, Kazuhiro SHOJI | 2025-09-30 |
| 12042813 | Substrate processing method and substrate processing apparatus | Hiroshi Abe, Takashi Ota, Takaaki ISHIZU, Kenji Kobayashi, Sei NEGORO +2 more | 2024-07-23 |
| 11961757 | Substrate holding apparatus and substrate processing apparatus | — | 2024-04-16 |
| 11443972 | Substrate processing apparatus | — | 2022-09-13 |
| 11211264 | Substrate processing apparatus and substrate processing method | Michinori IWAO | 2021-12-28 |
| 11101146 | Substrate processing apparatus | Nobuaki OKITA, Takayuki Nishida | 2021-08-24 |
| 10998220 | Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method | Hiroaki Ishii | 2021-05-04 |
| 10964556 | Substrate processing apparatus, substrate processing system, and substrate processing method | Mitsukazu Takahashi | 2021-03-30 |
| 10910240 | Substrate processing device | — | 2021-02-02 |
| 10622242 | Substrate inverting device, substrate processing apparatus, and substrate supporting device, and substrate inverting method, substrate processing method, and substrate supporting method | — | 2020-04-14 |
| 10573542 | Heater cleaning method | — | 2020-02-25 |
| 10249517 | Substrate processing apparatus | Michinori IWAO | 2019-04-02 |
| 10032654 | Substrate treatment apparatus | Sei NEGORO, Toyohide Hayashi, Koji Hashimoto, Yasuhiko Nagai | 2018-07-24 |
| 9991141 | Substrate processing apparatus and heater cleaning method | — | 2018-06-05 |
| 9624046 | Substrate processing apparatus and substrate conveying apparatus for use in the same | Ichiro Mitsuyoshi | 2017-04-18 |
| 9403187 | Substrate processing method and substrate processing apparatus | Sei NEGORO, Yasuhiko Nagai, Tsutomu OSUKA, Keiji Iwata | 2016-08-02 |
| 9340761 | Substrate processing method and substrate processing apparatus | Sei NEGORO, Yasuhiko Nagai, Tsutomu OSUKA, Keiji Iwata | 2016-05-17 |
| 9059226 | Substrate treatment apparatus | — | 2015-06-16 |
| 8877076 | Substrate treatment apparatus and substrate treatment method | Sei NEGORO, Toyohide Hayashi, Koji Hashimoto, Yasuhiko Nagai | 2014-11-04 |
| 8851821 | Substrate processing apparatus and substrate conveying apparatus for use in the same | Ichiro Mitsuyoshi | 2014-10-07 |
| 8033288 | Substrate treatment apparatus | Akio Shiomi, Yoshihiro Nishina, Toru Sato | 2011-10-11 |