Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080566 | Substrate treating apparatus and substrate treating method | Taiki HINODE, Takashi Ota, Kazuhiro Honsho, Yusuke Akizuki | 2024-09-03 |
| 10964556 | Substrate processing apparatus, substrate processing system, and substrate processing method | Ryo MURAMOTO | 2021-03-30 |
| 10910247 | Substrate container, load port apparatus, and substrate treating apparatus | Kazuhiro Honsho, Akito Hatano, Koji Hashimoto | 2021-02-02 |
| 10381249 | Substrate container, load port apparatus, and substrate treating apparatus | Kazuhiro Honsho, Akito Hatano, Koji Hashimoto | 2019-08-13 |
| 9601357 | Substrate processing device and substrate processing method | Koji Hashimoto, Masahiro Miyagi | 2017-03-21 |
| 9576831 | Substrate container, a load port apparatus, and a substrate treating apparatus | Akito Hatano, Koji Hashimoto, Kazuhiro Honsho | 2017-02-21 |
| 9327918 | Substrate processing apparatus and substrate processing method for performing cleaning process and the like on substrate | Motoyasu Hayashi, Jun Shibukawa | 2016-05-03 |
| 7371997 | Thermal processing apparatus and thermal processing method | Toshiyuki Kobayashi, Yoshiro Koyama | 2008-05-13 |
| 7038173 | Thermal processing apparatus and thermal processing method | Tosiyuki Kobayashi, Toshimitsu Funayoshi | 2006-05-02 |
| 6868302 | Thermal processing apparatus | Toshiyuki Kobayashi, Yoshihiro Koyama | 2005-03-15 |
| 6518547 | Heat treatment apparatus | Hideo Nishihara, Yoshio Ito | 2003-02-11 |
| 5539855 | Apparatus for measuring the temperature of a substrate | Takatoshi Chiba, Katsuichi Akiyoshi | 1996-07-23 |
| 5315092 | Apparatus for heat-treating wafer by light-irradiation and device for measuring temperature of substrate used in such apparatus | Takatoshi Chiba, Kiyofumi Nishii | 1994-05-24 |