Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11516884 | Light irradiation type heat treatment method and heat treatment apparatus that calculates a temperature of a substrate based on a treatment recipe applicable thereto | Tomohiro Ueno, Takayuki Aoyama, Mao Omori, Takahiro Kitazawa | 2022-11-29 |
| 10679874 | Light irradiation type heat treatment apparatus and heat treatment method | Mao Omori | 2020-06-09 |
| 5539855 | Apparatus for measuring the temperature of a substrate | Mitsukazu Takahashi, Takatoshi Chiba | 1996-07-23 |