Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412761 | Method of controlling the patterned wafer process temperature using the contact type thermometer in the front side of a dummy substrate to accurately measure emissivity in order to perform temperature measurement using radiation thermometer | Shuhei Onishi | 2025-09-09 |
| 12154800 | Heat treatment apparatus and heat treatment method | Yukio Ono, Oma NAKAJIMA | 2024-11-26 |
| 12057352 | Heat treatment method and heat treatment apparatus of light irradiation type | Mao Omori, Kazuhiko Fuse | 2024-08-06 |
| 11876006 | Heat treatment method and heat treatment apparatus of light irradiation type | Tomohiro Ueno, Yoshihide Nozaki | 2024-01-16 |
| 11516884 | Light irradiation type heat treatment method and heat treatment apparatus that calculates a temperature of a substrate based on a treatment recipe applicable thereto | Tomohiro Ueno, Takayuki Aoyama, Mao Omori, Katsuichi Akiyoshi | 2022-11-29 |
| 11476167 | Heat treatment method and heat treatment apparatus of light irradiation type | Mao Omori, Kazuhiko Fuse | 2022-10-18 |
| 10784127 | Method of adjusting measurement position of radiation thermometer and heat treatment apparatus | Kazuhiko Fuse, Shinji Miyawaki | 2020-09-22 |
| 10643869 | Light irradiation type heat treatment apparatus and heat treatment method | Kazuhiko Fuse | 2020-05-05 |
| 7012285 | Semiconductor device | Tadayoshi Nakatsuka, Toshiharu Tambo, Akiyoshi Tamura, Katsuyoshi Tara | 2006-03-14 |