Issued Patents All Time
Showing 1–25 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341031 | Light irradiation type heat treatment method and heat treatment apparatus | Akitsugu Ueda | 2025-06-24 |
| 12283498 | Light irradiation type heat treatment apparatus | Akitsugu Ueda, Hiroshi Miyake, Hideaki Tanimura | 2025-04-22 |
| 12160936 | Heat treatment apparatus of light irradiation type and method for cleaning heat treatment apparatus | — | 2024-12-03 |
| 12057352 | Heat treatment method and heat treatment apparatus of light irradiation type | Takahiro Kitazawa, Mao Omori | 2024-08-06 |
| 12020958 | Light irradiation type heat treatment method | Mao Omori | 2024-06-25 |
| 11908703 | Light irradiation type heat treatment method | Mao Omori | 2024-02-20 |
| 11901200 | Light irradiation type heat treatment method and heat treatment apparatus | Akitsugu Ueda | 2024-02-13 |
| 11881420 | Light-irradiation thermal treatment apparatus | Takahiro Yamada, Makoto Abe, Jun Watanabe, Shinji Miyawaki | 2024-01-23 |
| 11798823 | Light irradiation type thermal process apparatus using a gas ring | Hiroshi Miyake, Akitsugu Ueda | 2023-10-24 |
| 11764100 | Heat treatment susceptor and heat treatment apparatus | — | 2023-09-19 |
| 11574824 | Heat treatment method including low temperature degassing before flash lamp anneal and heat treatment apparatus thereof | Takayuki Aoyama, Shinichi Kato, Hikaru Kawarazaki, Masashi Furukawa, Hideaki Tanimura +1 more | 2023-02-07 |
| 11476167 | Heat treatment method and heat treatment apparatus of light irradiation type | Takahiro Kitazawa, Mao Omori | 2022-10-18 |
| 11322375 | Light irradiation type heat treatment method and heat treatment apparatus | Akitsugu Ueda | 2022-05-03 |
| 11289344 | Heat treatment method and heat treatment apparatus for managing dummy wafer | Tomohiro Ueno, Mao Omori | 2022-03-29 |
| 11282708 | Light irradiation type heat treatment method and heat treatment apparatus | Akitsugu Ueda | 2022-03-22 |
| 11024521 | Heat treatment method for managing dummy wafer | Tomohiro Ueno, Mao Omori | 2021-06-01 |
| 11024524 | Heat treatment method and heat treatment apparatus for managing dummy wafer | Tomohiro Ueno, Mao Omori | 2021-06-01 |
| 11004693 | Light-irradiation heat treatment method and heat treatment apparatus | — | 2021-05-11 |
| 10978319 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Shinichi Kato, Hideaki Tanimura | 2021-04-13 |
| 10950472 | Light-irradiation thermal treatment apparatus | Takahiro Yamada, Makoto Abe, Jun Watanabe, Shinji Miyawaki | 2021-03-16 |
| 10879072 | Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light | Shinichi Kato, Kenichi Yokouchi | 2020-12-29 |
| 10790171 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Shinichi Kato, Hideaki Tanimura | 2020-09-29 |
| 10784127 | Method of adjusting measurement position of radiation thermometer and heat treatment apparatus | Shinji Miyawaki, Takahiro Kitazawa | 2020-09-22 |
| 10777415 | Heat treatment method for dopant introduction | Hikaru Kawarazaki, Hideaki Tanimura, Shinichi Kato | 2020-09-15 |
| 10643869 | Light irradiation type heat treatment apparatus and heat treatment method | Takahiro Kitazawa | 2020-05-05 |