Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283498 | Light irradiation type heat treatment apparatus | Akitsugu Ueda, Hiroshi Miyake, Kazuhiko Fuse | 2025-04-22 |
| 12219670 | Light-irradiation heat treatment apparatus | Makoto Abe, Hikaru Kawarazaki, Masashi Furukawa | 2025-02-04 |
| 11574824 | Heat treatment method including low temperature degassing before flash lamp anneal and heat treatment apparatus thereof | Takayuki Aoyama, Shinichi Kato, Kazuhiko Fuse, Hikaru Kawarazaki, Masashi Furukawa +1 more | 2023-02-07 |
| 11089657 | Light-irradiation heat treatment apparatus | Makoto Abe, Hikaru Kawarazaki, Masashi Furukawa | 2021-08-10 |
| 10985021 | Method for fabricating p-type gallium nitride semiconductor and method of heat treatment | Takahiro Yamada, Shinichi Kato, Takayuki Aoyama | 2021-04-20 |
| 10978319 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Shinichi Kato, Kazuhiko Fuse | 2021-04-13 |
| 10790171 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Shinichi Kato, Kazuhiko Fuse | 2020-09-29 |
| 10777415 | Heat treatment method for dopant introduction | Kazuhiko Fuse, Hikaru Kawarazaki, Shinichi Kato | 2020-09-15 |
| 10699906 | Heat treatment method for p-type semiconductor | — | 2020-06-30 |
| 10643850 | Dopant introduction method and thermal treatment method | Takayuki Aoyama, Kazuhiko Fuse, Takahiro Yamada | 2020-05-05 |
| 10580667 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Yasuaki Kondo, Shinji Miyawaki, Shinichi Kato, Kazuhiko Fuse +3 more | 2020-03-03 |
| 10424483 | Light irradiation type heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Kazuhiko Fuse, Shinichi Kato | 2019-09-24 |
| 10347512 | Method and apparatus for light-irradiation heat treatment | Kazuhiko Fuse | 2019-07-09 |
| 10181404 | Light irradiation type heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Kazuhiko Fuse, Shinichi Kato | 2019-01-15 |
| 10121683 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Shinichi Kato, Kazuhiko Fuse | 2018-11-06 |
| 10121664 | Dopant introduction method and heat treatment method | Kazuhiko Fuse, Shinichi Kato | 2018-11-06 |
| 9799517 | Apparatus and method for light-irradiation heat treatment | Kaoru Matsuo, Kazuhiko Fuse, Shinichi Kato | 2017-10-24 |
| 9741576 | Light irradiation type heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Kazuhiko Fuse, Shinichi Kato | 2017-08-22 |