Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12219670 | Light-irradiation heat treatment apparatus | Makoto Abe, Hideaki Tanimura, Masashi Furukawa | 2025-02-04 |
| 11574824 | Heat treatment method including low temperature degassing before flash lamp anneal and heat treatment apparatus thereof | Takayuki Aoyama, Shinichi Kato, Kazuhiko Fuse, Masashi Furukawa, Hideaki Tanimura +1 more | 2023-02-07 |
| 11430676 | Heat treatment method of light irradiation type | Yoshihide Nozaki | 2022-08-30 |
| 11089657 | Light-irradiation heat treatment apparatus | Makoto Abe, Hideaki Tanimura, Masashi Furukawa | 2021-08-10 |
| 10978319 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Masashi Furukawa, Shinichi Kato, Kazuhiko Fuse, Hideaki Tanimura | 2021-04-13 |
| 10903126 | Light irradiation type heat treatment method and heat treatment apparatus | — | 2021-01-26 |
| 10790171 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Masashi Furukawa, Shinichi Kato, Kazuhiko Fuse, Hideaki Tanimura | 2020-09-29 |
| 10777415 | Heat treatment method for dopant introduction | Kazuhiko Fuse, Hideaki Tanimura, Shinichi Kato | 2020-09-15 |
| 10658250 | Light irradiation type heat treatment method and heat treatment apparatus | — | 2020-05-19 |
| 10580667 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Yasuaki Kondo, Shinji Miyawaki, Shinichi Kato, Kazuhiko Fuse +3 more | 2020-03-03 |
| 10573569 | Thermal processing apparatus and thermal processing method through light irradiation | Masashi Furukawa, Kazuhiko Fuse | 2020-02-25 |
| 10446397 | Thermal processing method through light irradiation | Takayuki Aoyama | 2019-10-15 |
| 10424483 | Light irradiation type heat treatment method and heat treatment apparatus | Takayuki Aoyama, Masashi Furukawa, Kazuhiko Fuse, Hideaki Tanimura, Shinichi Kato | 2019-09-24 |
| 10354894 | Light-irradiation heat treatment apparatus | Makoto Abe, Takahiro Yamada | 2019-07-16 |
| 10181404 | Light irradiation type heat treatment method and heat treatment apparatus | Takayuki Aoyama, Masashi Furukawa, Kazuhiko Fuse, Hideaki Tanimura, Shinichi Kato | 2019-01-15 |
| 10121683 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Masashi Furukawa, Shinichi Kato, Kazuhiko Fuse, Hideaki Tanimura | 2018-11-06 |
| 9966254 | Method and apparatus for heat-treating high dielectric constant film | — | 2018-05-08 |
| 9837266 | Method and apparatus for heat-treating high dielectric constant film | — | 2017-12-05 |
| 9741576 | Light irradiation type heat treatment method and heat treatment apparatus | Takayuki Aoyama, Masashi Furukawa, Kazuhiko Fuse, Hideaki Tanimura, Shinichi Kato | 2017-08-22 |
| 9557110 | Method and apparatus for heat-treating high dielectric constant film | — | 2017-01-31 |