Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125723 | Heat treatment method and heat treatment apparatus | Oma NAKAJIMA | 2024-10-22 |
| 12057352 | Heat treatment method and heat treatment apparatus of light irradiation type | Takahiro Kitazawa, Kazuhiko Fuse | 2024-08-06 |
| 12051596 | Heat treatment method and heat treatment apparatus | Yasuaki Kondo | 2024-07-30 |
| 12020958 | Light irradiation type heat treatment method | Kazuhiko Fuse | 2024-06-25 |
| 11908703 | Light irradiation type heat treatment method | Kazuhiko Fuse | 2024-02-20 |
| 11764073 | Light irradiation type heat treatment method | Masashi Furukawa | 2023-09-19 |
| 11746410 | Heat treatment apparatus heating substrate | Yasuaki Kondo | 2023-09-05 |
| 11621178 | Light irradiation type heat treatment apparatus including oxygen analyzer and heat treatment method thereof | Takayuki Aoyama, Akitsugu Ueda, Kazunori AMAGO | 2023-04-04 |
| 11551946 | Light irradiation type heat treatment method and heat treatment apparatus | Yoshihide Nozaki, Yoshio Ito | 2023-01-10 |
| 11516884 | Light irradiation type heat treatment method and heat treatment apparatus that calculates a temperature of a substrate based on a treatment recipe applicable thereto | Tomohiro Ueno, Takayuki Aoyama, Takahiro Kitazawa, Katsuichi Akiyoshi | 2022-11-29 |
| 11476167 | Heat treatment method and heat treatment apparatus of light irradiation type | Takahiro Kitazawa, Kazuhiko Fuse | 2022-10-18 |
| 11289344 | Heat treatment method and heat treatment apparatus for managing dummy wafer | Tomohiro Ueno, Kazuhiko Fuse | 2022-03-29 |
| 11081409 | Heat treatment apparatus of light irradiation type and heat treatment method | Takashi Ito, Nobuhiko Nishide | 2021-08-03 |
| 11024521 | Heat treatment method for managing dummy wafer | Tomohiro Ueno, Kazuhiko Fuse | 2021-06-01 |
| 11024524 | Heat treatment method and heat treatment apparatus for managing dummy wafer | Tomohiro Ueno, Kazuhiko Fuse | 2021-06-01 |
| 10930521 | Light irradiation type heat treatment method | Masashi Furukawa | 2021-02-23 |
| 10679874 | Light irradiation type heat treatment apparatus and heat treatment method | Katsuichi Akiyoshi | 2020-06-09 |
| 10446415 | Exhaust method of heat treatment apparatus | Omo Nakajima | 2019-10-15 |