Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230518 | Light irradiation type heat treatment apparatus | — | 2025-02-18 |
| 11328941 | Light irradiation type heat treatment apparatus | Hiroshi Miyake | 2022-05-10 |
| 11081409 | Heat treatment apparatus of light irradiation type and heat treatment method | Mao Omori, Takashi Ito | 2021-08-03 |
| 10903095 | Heat treatment apparatus of light irradiation type | Takuya Kamimura | 2021-01-26 |
| 10475674 | Light irradiation type heat treatment apparatus and method for manufacturing heat treatment apparatus | Hiroshi Miyake | 2019-11-12 |
| 9831108 | Thermal processing apparatus and thermal processing method for heating substrate by light irradiation | Kenichi Yokouchi | 2017-11-28 |
| 9351341 | Heat treatment apparatus for heating substrate by irradiating substrate with flash of light | — | 2016-05-24 |
| 8262799 | Substrate processing apparatus and substrate transferring method | — | 2012-09-11 |