Issued Patents All Time
Showing 26–48 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10643850 | Dopant introduction method and thermal treatment method | Hideaki Tanimura, Takayuki Aoyama, Takahiro Yamada | 2020-05-05 |
| 10636676 | Heat treatment method and heat treatment apparatus of light irradiation type | Yukio Ono, Kaoru Matsuo | 2020-04-28 |
| 10580667 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Yasuaki Kondo, Shinji Miyawaki, Shinichi Kato, Hideaki Tanimura +3 more | 2020-03-03 |
| 10573569 | Thermal processing apparatus and thermal processing method through light irradiation | Masashi Furukawa, Hikaru Kawarazaki | 2020-02-25 |
| 10424483 | Light irradiation type heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Hideaki Tanimura, Shinichi Kato | 2019-09-24 |
| 10347512 | Method and apparatus for light-irradiation heat treatment | Hideaki Tanimura | 2019-07-09 |
| 10276385 | Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light | Shinichi Kato, Kenichi Yokouchi | 2019-04-30 |
| 10181404 | Light irradiation type heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Hideaki Tanimura, Shinichi Kato | 2019-01-15 |
| 10153184 | Light irradiation type heat treatment apparatus | Yoshio Ito | 2018-12-11 |
| 10128135 | Heat treatment method and heat treatment device | — | 2018-11-13 |
| 10121664 | Dopant introduction method and heat treatment method | Hideaki Tanimura, Shinichi Kato | 2018-11-06 |
| 10121683 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Shinichi Kato, Hideaki Tanimura | 2018-11-06 |
| 9805932 | Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light | Shinichi Kato, Kenichi Yokouchi | 2017-10-31 |
| 9799517 | Apparatus and method for light-irradiation heat treatment | Hideaki Tanimura, Kaoru Matsuo, Shinichi Kato | 2017-10-24 |
| 9741576 | Light irradiation type heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Hideaki Tanimura, Shinichi Kato | 2017-08-22 |
| 9343313 | Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light | Shinichi Kato, Kenichi Yokouchi | 2016-05-17 |
| 8852966 | Heat treatment method and heat treatment apparatus of thin film | Hiroki Kiyama, Shinichi Kato | 2014-10-07 |
| 8664116 | Heat treatment method for growing silicide | Shinichi Kato | 2014-03-04 |
| 8623750 | Heat treatment method for promoting crystallization of high dielectric constant film | Shinichi Kato | 2014-01-07 |
| 7795886 | Surface voltmeter | Motohiro Kono, Toshikazu Kitajima, Yoshiyuki Nakazawa | 2010-09-14 |
| 7598746 | Surface voltmeter and surface voltage measurement method | Motohiro Kono, Yoshiyuki Nakazawa | 2009-10-06 |
| 6364692 | Water proof connector | Yasushi Okayasu, Osamu Taniuchi, Hitoshi Okumura | 2002-04-02 |
| 5545055 | Method and apparatus for mechanically and electrically coupling metal terminals in a housing | Seiji Tanaka, Shuji Kosuge | 1996-08-13 |