Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11986867 | Substrate processing method and substrate processing apparatus | Akira Horikoshi, Shohei Nakamura, Shigeru Takatsuji, Takahiro Kimura, Kenji Kobayashi | 2024-05-21 |
| 11267729 | In-liquid plasma generation device and liquid treatment apparatus | Akira Horikoshi, Shohei Nakamura, Shigeru Takatsuji | 2022-03-08 |
| 9766132 | Measuring apparatus and measuring method | Yasuhiro Takase, Hidetoshi Nakanishi, Kazuo Kinose | 2017-09-19 |
| 7795886 | Surface voltmeter | Toshikazu Kitajima, Kazuhiko Fuse, Yoshiyuki Nakazawa | 2010-09-14 |
| 7598746 | Surface voltmeter and surface voltage measurement method | Kazuhiko Fuse, Yoshiyuki Nakazawa | 2009-10-06 |
| 7427520 | Method and apparatus for measuring thickness of thin film formed on substrate | Yoshiyuki Nakazawa, Toshikazu Kitajima | 2008-09-23 |
| 7375537 | Method and apparatus for measuring relative dielectric constant | Toshikazu Kitajima | 2008-05-20 |
| 6915232 | Film thickness measuring method, relative dielectric constant measuring method, film thickness measuring apparatus, and relative dielectric constant measuring apparatus | Toshikazu Kitajima | 2005-07-05 |
| 6278267 | Method of determining impurity content and apparatus for the same | Hiroshi Okada, Sadao Hirae | 2001-08-21 |
| 6037781 | Measurement of electrical characteristics of semiconductor wafer | Tatsufumi Kusuda | 2000-03-14 |
| 4746857 | Probing apparatus for measuring electrical characteristics of semiconductor device formed on wafer | Takamasa Sakai, Takayuki Umaba, Yoshiyuki Nakagawa, Yoshihiro Koyama | 1988-05-24 |