Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7600522 | Substrate treatment method and substrate treatment apparatus | Masanobu Sato, Shuichi Yasuda | 2009-10-13 |
| 7479205 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Shuichi Yasuda +2 more | 2009-01-20 |
| 7428907 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Shuichi Yasuda +2 more | 2008-09-30 |
| 7267130 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Shuichi Yasuda +2 more | 2007-09-11 |
| 6951221 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Shuichi Yasuda +2 more | 2005-10-04 |
| 6901938 | Substrate cleaning apparatus | Masanobu Sato, Shuichi Yasuda, Kenya Morinishi | 2005-06-07 |
| 6729561 | Cleaning nozzle and substrate cleaning apparatus | Masanobu Sato, Shuichi Yasuda | 2004-05-04 |
| 6705331 | Substrate cleaning apparatus | Masanobu Sato, Shuichi Yasuda, Kenya Morinishi | 2004-03-16 |
| 6598805 | Substrate cleaning apparatus | Takamasa Sakai | 2003-07-29 |
| 6278267 | Method of determining impurity content and apparatus for the same | Hiroshi Okada, Motohiro Kono | 2001-08-21 |
| 5857474 | Method of and apparatus for washing a substrate | Takamasa Sakai, Minobu Matsunaga | 1999-01-12 |
| 5568252 | Method and apparatus for measuring insulation film thickness of semiconductor wafer | Tatsufumi Kusuda, Motohiro Kouno, Ikuyoshi Nakatani | 1996-10-22 |
| 5554939 | Non-destructive measuring sensor for semiconductor wafer and method of manufacturing the same | Hideaki Matsubara, Motohiro Kouno, Takamasa Sakai | 1996-09-10 |
| 5504437 | Apparatus and method for electrical measurement of semiconductor wafers | Hiroshi Okada, Hideaki Matsubara | 1996-04-02 |
| 5475319 | Method of measuring electric charge of semiconductor wafer | Motohiro Kouno, Hideaki Matsubara | 1995-12-12 |
| 5444389 | Method and apparatus for measuring lifetime of minority carriers in semiconductor | Motohiro Kouno, Takamasa Sakai | 1995-08-22 |
| 5314831 | Method of and apparatus for evaluating crystal rate in silicon thin film | Noriyuki Kondo, Seiichiro Sato | 1994-05-24 |
| 5239183 | Optical gap measuring device using frustrated internal reflection | Motohiro Kouno, Ikuyoshi Nakatani, Takamasa Sakai | 1993-08-24 |
| 5225690 | Gap measuring device and method using frustrated internal reflection | Takamasa Sakai, Motohiro Kouno, Ikuyoshi Nakatani | 1993-07-06 |