Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7105074 | Substrate treating method and apparatus | Osamu Tamada, Tsuyoshi Mitsuhashi, Katsushi Yoshioka, Kenji Sugimoto, Kaoru Aoki +5 more | 2006-09-12 |
| 6869234 | Developing apparatus and developing method | Masakazu Sanada, Masahiko Harumoto, Hiroshi Kobayashi, Akihiko Morita | 2005-03-22 |
| 6832863 | Substrate treating apparatus and method | Kenji Sugimoto, Masakazu Sanada, Katsushi Yoshioka, Kaoru Aoki, Moritaka Yano +4 more | 2004-12-21 |
| 6827782 | Chemical treating apparatus | Shigehiro Goto, Katsushi Yoshioka | 2004-12-07 |
| 6752544 | Developing apparatus and developing method | Masakazu Sanada, Masahiko Harumoto, Hiroshi Kobayashi | 2004-06-22 |
| 6656277 | Apparatus for and method of processing substrate | Masakazu Sanada, Masahiko Harumoto, Hiroshi Kobayashi | 2003-12-02 |
| 6558053 | Substrate processing apparatus | Kazuhito Shigemori, Masakazu Sanada, Katsushi Yoshioka, Kenji Sugimoto, Kaoru Aoki +7 more | 2003-05-06 |
| 6440218 | Coating solution applying method and apparatus | Masakazu Sanada, Kayoko Nakano, Shigehiro Goto | 2002-08-27 |
| 6099643 | Apparatus for processing a substrate providing an efficient arrangement and atmospheric isolation of chemical treatment section | Masami Ohtani, Tutomu Ueyama, Ryuji Kitakado, Kaoru Aoki | 2000-08-08 |
| 6080969 | Apparatus for and method of thermally processing substrate | Hiroyasu Goto, Akihiro Hisai, Hiroshi Kobayashi | 2000-06-27 |
| 5984540 | Developing apparatus and developing method | Masahiro Mimasaka, Akiko Tanaka, Koji Uchitani | 1999-11-16 |
| 5976620 | Coating solution applying method and apparatus | Masakazu Sanada | 1999-11-02 |
| 5963753 | Substrate processing apparatus | Masami Ohtani, Tutomu Ueyama, Ryuji Kitakado, Kaoru Aoki, Masao Tsuji | 1999-10-05 |
| 5927077 | Processing system hot plate construction substrate | Akihiro Hisai, Hiroshi Kobayashi | 1999-07-27 |
| 5865893 | Spin coating apparatus | Masahiro Mimasaka, Ikuo Mizobata | 1999-02-02 |
| 5857474 | Method of and apparatus for washing a substrate | Takamasa Sakai, Sadao Hirae | 1999-01-12 |
| 5638687 | Substrate cooling method and apparatus | Yasuhiro Mizohata | 1997-06-17 |
| 5522215 | Substrate cooling apparatus | Masao Tsuji | 1996-06-04 |
| 5411076 | Substrate cooling device and substrate heat-treating apparatus | Yasuhiro Mizohata | 1995-05-02 |