Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651056 | Treating liquid vaporizing apparatus | Atsushi Tanaka, Yukihiko Inagaki, Koji Nishi, Toru Momma | 2020-05-12 |
| 10629463 | Thermal processing apparatus and thermal processing method | Toru Momma, Yasuhiro Fukumoto, Koji Nishi, Kenichiro Jo, Atsushi Tanaka | 2020-04-21 |
| 10214814 | Substrate treating apparatus and treatment gas supplying nozzle | Yasuhiro Fukumoto, Koji Nishi, Toru Momma, Atsushi Tanaka, Kenichiro Jo | 2019-02-26 |
| 9508573 | Substrate processing apparatus and substrate processing method | Masahito KASHIYAMA, Tomohiro Matsuo, Tomohiro Goto | 2016-11-29 |
| 8608885 | Substrate heat treatment apparatus | Keiji Matsuchika, Akihiko Morita | 2013-12-17 |
| 8003919 | Substrate heat treatment apparatus | Keiji Matsuchika, Akira Yamaguchi, Akihiko Morita | 2011-08-23 |
| 7718925 | Substrate heat treatment apparatus | Keiji Matsuchika | 2010-05-18 |
| 7628862 | Treating solution supply nozzle, a substrate treating apparatus having this nozzle, and a method of manufacturing a treating solution supply nozzle | Hiroshi Kobayashi | 2009-12-08 |
| 7432476 | Substrate heat treatment apparatus | Akihiko Morita, Keiji Matsuchika | 2008-10-07 |
| 7267723 | Treating solution supply nozzle, a substrate treating apparatus having this nozzle, and a method of manufacturing a treating solution supply nozzle | Hiroshi Kobayashi | 2007-09-11 |
| 6827782 | Chemical treating apparatus | Katsushi Yoshioka, Minobu Matsunaga | 2004-12-07 |
| 6440218 | Coating solution applying method and apparatus | Masakazu Sanada, Kayoko Nakano, Minobu Matsunaga | 2002-08-27 |