Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8608885 | Substrate heat treatment apparatus | Shigehiro Goto, Akihiko Morita | 2013-12-17 |
| 8003919 | Substrate heat treatment apparatus | Shigehiro Goto, Akira Yamaguchi, Akihiko Morita | 2011-08-23 |
| 7718925 | Substrate heat treatment apparatus | Shigehiro Goto | 2010-05-18 |
| 7432476 | Substrate heat treatment apparatus | Akihiko Morita, Shigehiro Goto | 2008-10-07 |