Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10617983 | Filter coupling device and a substrate treating apparatus having same | Masahito KASHIYAMA | 2020-04-14 |
| 9152054 | Exposure device, substrate processing apparatus, method for exposing substrate and substrate processing method | Kazuhiro Nishimura, Yukihiko Inagaki | 2015-10-06 |
| 8608885 | Substrate heat treatment apparatus | Shigehiro Goto, Keiji Matsuchika | 2013-12-17 |
| 8383990 | Substrate transport apparatus and heat treatment apparatus | Kenichi Oyama, Koji Nishi | 2013-02-26 |
| 8003919 | Substrate heat treatment apparatus | Shigehiro Goto, Keiji Matsuchika, Akira Yamaguchi | 2011-08-23 |
| 7432476 | Substrate heat treatment apparatus | Shigehiro Goto, Keiji Matsuchika | 2008-10-07 |
| 7359840 | Remote order acceptance design system and elevator remote order acceptance method | Shingo Akasaka, Atsuhiro Ishida, Shinichi Taniguchi, Masahiro Oka, Hideaki Suzuki | 2008-04-15 |
| 7249250 | Remote order acceptance design system and elevator remote order acceptance method | Shingo Akasaka, Atsuhiro Ishida, Shinichi Taniguchi, Masahiro Oka, Hideaki Suzuki | 2007-07-24 |
| 7048801 | Chemical pump and method of discharging chemical solution | — | 2006-05-23 |
| 6869234 | Developing apparatus and developing method | Masakazu Sanada, Masahiko Harumoto, Hiroshi Kobayashi, Minobu Matsunaga | 2005-03-22 |
| 6286525 | Substrate cleaning apparatus and method | Joichi Nishimura, Masami Ohtani | 2001-09-11 |
| 6260562 | Substrate cleaning apparatus and method | Kenya Morinishi, Masami Ohtani, Joichi Nishimura | 2001-07-17 |
| 6159291 | Substrate treating apparatus | Joichi Nishimura, Masami Ohtani | 2000-12-12 |
| 6062852 | Substrate heat-treating apparatus | Takanori Kawamoto, Masami Ohtani, Yasuo Imanishi, Masao Tsuji, Masaki Iwami +1 more | 2000-05-16 |
| 6060697 | Substrate processing apparatus having regulated power consumption and method therefor | Masami Ohtani, Yasuo Imanishi, Masao Tsuji, Masaki Iwami, Joichi Nishimura +4 more | 2000-05-09 |
| 6051101 | Substrate processing apparatus, substrate transport apparatus and substrate transfer apparatus | Masami Ohtani, Yasuo Imanishi, Masao Tsuji, Takanori Kawamoto, Masaki Iwami +1 more | 2000-04-18 |
| 5881876 | Method and vessel for storing a substrate cleaning brush | Masahiro Nonomura, Naoko Onodera, Fumitake Mieno | 1999-03-16 |
| 5853483 | Substrate spin treating method and apparatus | Kenji Ueno | 1998-12-29 |