Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11813646 | Substrate processing device | Nobuaki OKITA | 2023-11-14 |
| 8746171 | Substrate treating system | — | 2014-06-10 |
| 8286293 | Substrate cleaning device and substrate processing apparatus including the same | Koji Nishiyama, Hiroshi Yoshii | 2012-10-16 |
| 7641406 | Bevel inspection apparatus for substrate processing | Hiroshi Yoshii, Koji Nishiyama | 2010-01-05 |
| 7231273 | Substrate processing apparatus and method including obstacle detection | Masami Otani | 2007-06-12 |
| 6896466 | Substrate processing apparatus | Masami Ohtani, Yasuhiko Hashimoto | 2005-05-24 |
| 6790286 | Substrate processing apparatus | Masami Ohtani, Kenji Hashinoki, Masayoshi Shiga, Koji Hashimoto | 2004-09-14 |
| 6790287 | Substrate processing apparatus, substrate inspection method and substrate processing system | Masayoshi Shiga, Kenji Hashinoki, Masami Ohtani | 2004-09-14 |
| 6688189 | Robot | Yasuhiko Hashimoto, Masami Ohtani | 2004-02-10 |
| 6371713 | Substrate processing apparatus | Masami Ohtani, Yasuhiko Hashimoto | 2002-04-16 |
| 6286525 | Substrate cleaning apparatus and method | Akihiko Morita, Masami Ohtani | 2001-09-11 |
| 6260562 | Substrate cleaning apparatus and method | Kenya Morinishi, Masami Ohtani, Akihiko Morita | 2001-07-17 |
| 6159291 | Substrate treating apparatus | Akihiko Morita, Masami Ohtani | 2000-12-12 |
| 6151744 | Method of and apparatus for cleaning substrate | Masami Ohtani, Masahide Ikeda, Mitsuhiro Fujita | 2000-11-28 |
| 6062852 | Substrate heat-treating apparatus | Takanori Kawamoto, Masami Ohtani, Yasuo Imanishi, Masao Tsuji, Masaki Iwami +1 more | 2000-05-16 |
| 6060697 | Substrate processing apparatus having regulated power consumption and method therefor | Akihiko Morita, Masami Ohtani, Yasuo Imanishi, Masao Tsuji, Masaki Iwami +4 more | 2000-05-09 |
| 6051101 | Substrate processing apparatus, substrate transport apparatus and substrate transfer apparatus | Masami Ohtani, Yasuo Imanishi, Masao Tsuji, Takanori Kawamoto, Masaki Iwami +1 more | 2000-04-18 |
| 5860178 | Substrate spin cleaning apparatus | Tadashi Sasaki | 1999-01-19 |
| 5829087 | Substrate spin cleaning apparatus | Tadashi Sasaki, Masami Ohtani | 1998-11-03 |