Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7728822 | Touch-panel input device having a function for providing vibration and method for providing vibration in response to input operation | — | 2010-06-01 |
| 7665415 | Substrate processing apparatus | Kazuhiro Nishimura | 2010-02-23 |
| 7525650 | Substrate processing apparatus for performing photolithography | Kenji Hashinoki, Yasufumi Koyama | 2009-04-28 |
| 6790286 | Substrate processing apparatus | Joichi Nishimura, Masami Ohtani, Kenji Hashinoki, Koji Hashimoto | 2004-09-14 |
| 6790287 | Substrate processing apparatus, substrate inspection method and substrate processing system | Kenji Hashinoki, Masami Ohtani, Joichi Nishimura | 2004-09-14 |