Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7563323 | Substrate treating apparatus | Satoshi Yamamoto, Yasufumi Koyama | 2009-07-21 |
| 7525650 | Substrate processing apparatus for performing photolithography | Masayoshi Shiga, Yasufumi Koyama | 2009-04-28 |
| 7497912 | Substrate processing apparatus | Yasufumi Koyama, Takaharu Yamada | 2009-03-03 |
| 7317961 | Substrate processing apparatus and method of transporting substrates and method of processing substrates in substrate processing apparatus | Yasufumi Koyama, Takaharu Yamada | 2008-01-08 |
| 7229240 | Substrate processing apparatus and substrate processing method | Yasufumi Koyama, Takaharu Yamada | 2007-06-12 |
| 7128481 | Substrate processing apparatus for inspecting processing history data | — | 2006-10-31 |
| 7069099 | Method of transporting and processing substrates in substrate processing apparatus | Yasufumi Koyama, Takaharu Yamada | 2006-06-27 |
| 6963789 | Substrate processing apparatus control system and substrate processing apparatus | Tamihiro Bun, Kinya Murata, Kenji Kamei, Noriaki Yokono, Kenji Sugimoto +1 more | 2005-11-08 |
| 6837632 | Substrate treating apparatus | Yasufumi Koyama, Kenji Kamei, Toru Kitamoto, Satoshi Yamamoto, Toshiaki Dainin | 2005-01-04 |
| 6790286 | Substrate processing apparatus | Joichi Nishimura, Masami Ohtani, Masayoshi Shiga, Koji Hashimoto | 2004-09-14 |
| 6790287 | Substrate processing apparatus, substrate inspection method and substrate processing system | Masayoshi Shiga, Masami Ohtani, Joichi Nishimura | 2004-09-14 |
| 5687085 | Substrate processing apparatus and method | Toru Morimoto, Tetsuya Hamada, Kenji Kamei | 1997-11-11 |
| 5668733 | Substrate processing apparatus and method | Toru Morimoto, Tetsuya Hamada, Kenji Kamei | 1997-09-16 |