Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8477301 | Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatus | Masahito KASHIYAMA, Yukihiko Inagaki, Kazuya Akiyama, Isao Taniguchi | 2013-07-02 |
| 6963789 | Substrate processing apparatus control system and substrate processing apparatus | Tamihiro Bun, Kinya Murata, Kenji Hashinoki, Kenji Kamei, Kenji Sugimoto +1 more | 2005-11-08 |
| 6053058 | Atmosphere concentration monitoring for substrate processing apparatus and life determination for atmosphere processing unit of substrate processing apparatus | Toyohide Hayashi, Hiroaki Sugimoto, Masaya Asai | 2000-04-25 |
| 5436848 | Method of and device for transporting semiconductor substrate in semiconductor processing system | Masami Nishida, Masahiro Himoto, Tetsuya Hamada, Takeo Okamoto | 1995-07-25 |