Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495476 | Substrate treating apparatus | Tatsuhisa Tsuji, Koji Nishi, Ryuichi Yoshida | 2022-11-08 |
| 11152233 | Substrate treating apparatus and substrate treating method | Joji Kuwahara, Seiji Murai | 2021-10-19 |
| 11101156 | Substrate treating apparatus | Joji Kuwahara, Seiji Murai | 2021-08-24 |
| 10784125 | Substrate treating apparatus | — | 2020-09-22 |
| 10651056 | Treating liquid vaporizing apparatus | Atsushi Tanaka, Koji Nishi, Shigehiro Goto, Toru Momma | 2020-05-12 |
| 10573546 | Substrate treating apparatus | — | 2020-02-25 |
| 10286648 | Peripheral portion processing device and peripheral portion processing method | — | 2019-05-14 |
| 10269598 | Substrate treating apparatus | — | 2019-04-23 |
| 10201824 | Substrate processing apparatus and substrate processing method | — | 2019-02-12 |
| 10112205 | Substrate processing apparatus and substrate processing method | — | 2018-10-30 |
| 10047441 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Tadashi Miyagi, Koji Kaneyama | 2018-08-14 |
| 9993840 | Substrate processing apparatus and substrate processing method | — | 2018-06-12 |
| 9956565 | Substrate treating apparatus | — | 2018-05-01 |
| 9828676 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Tadashi Miyagi, Koji Kaneyama | 2017-11-28 |
| 9728434 | Substrate processing apparatus, storage device, and method of transporting substrate storing container | Kensaku Onishi, Jun Yamamoto | 2017-08-08 |
| 9566598 | Substrate processing apparatus and substrate processing method | — | 2017-02-14 |
| 9553007 | Coating method and coating apparatus | Tomohiro Goto | 2017-01-24 |
| 9375748 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Tadashi Miyagi, Koji Kaneyama | 2016-06-28 |
| 9343339 | Coating method and coating apparatus | Tomohiro Goto | 2016-05-17 |
| 9152054 | Exposure device, substrate processing apparatus, method for exposing substrate and substrate processing method | Kazuhiro Nishimura, Akihiko Morita | 2015-10-06 |
| 8827621 | Substrate processing apparatus, storage device, and method of transporting substrate storing container | Kensaku Onishi, Jun Yamamoto | 2014-09-09 |
| 8477301 | Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatus | Masahito KASHIYAMA, Kazuya Akiyama, Noriaki Yokono, Isao Taniguchi | 2013-07-02 |
| 6893171 | Substrate treating apparatus | Yoshiteru Fukutomi, Kenji Sugimoto, Takashi Ito, Takeo Okamoto, Katsushi Yoshioka +1 more | 2005-05-17 |
| 6814507 | Substrate treating apparatus | — | 2004-11-09 |
| 6752543 | Substrate processing apparatus | Yoshiteru Fukutomi, Katsushi Yoshioka | 2004-06-22 |