Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7105074 | Substrate treating method and apparatus | Osamu Tamada, Tsuyoshi Mitsuhashi, Minobu Matsunaga, Kenji Sugimoto, Kaoru Aoki +5 more | 2006-09-12 |
| 6893171 | Substrate treating apparatus | Yoshiteru Fukutomi, Kenji Sugimoto, Takashi Ito, Takeo Okamoto, Yukihiko Inagaki +1 more | 2005-05-17 |
| 6832863 | Substrate treating apparatus and method | Kenji Sugimoto, Minobu Matsunaga, Masakazu Sanada, Kaoru Aoki, Moritaka Yano +4 more | 2004-12-21 |
| 6827782 | Chemical treating apparatus | Shigehiro Goto, Minobu Matsunaga | 2004-12-07 |
| 6752543 | Substrate processing apparatus | Yoshiteru Fukutomi, Yukihiko Inagaki | 2004-06-22 |
| 6558053 | Substrate processing apparatus | Kazuhito Shigemori, Masakazu Sanada, Minobu Matsunaga, Kenji Sugimoto, Kaoru Aoki +7 more | 2003-05-06 |
| 6149727 | Substrate processing apparatus | Hiroyuki Ogura, Takuya Sanari | 2000-11-21 |
| 5792259 | Substrate processing apparatus and air supply method in substrate processing apparatus | Yoshiteru Fukutomi, Kenji Sugimoto | 1998-08-11 |
| 5762709 | Substrate spin coating apparatus | Kenji Sugimoto, Seiichiro Okuda, Tsuyoshi Mitsuhashi | 1998-06-09 |
| 5677000 | Substrate spin treating method and apparatus | Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Kenji Sugimoto | 1997-10-14 |
| 5376216 | Device for holding and rotating a substrate | Koji Nakagawa, Masayuki Itaba, Nobuyasu Hiraoka, Masafumi Takeoka | 1994-12-27 |