Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217986 | Substrate treating apparatus with parallel first and second parts of substrate treatment lines on multiple stories for simultaneously treating a plurality of substrates | Hiroyuki Ogura, Yoshiteru Fukutomi, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2025-02-04 |
| 11400480 | Substrate processing apparatus and substrate processing method | Takehiro Wajiki, Tadashi Miyagi | 2022-08-02 |
| 10423070 | Substrate treating method | Masashi Kanaoka, Masanori IMAMURA, Taiji Matsu, Hidetoshi Sagawa, Atsushi Tanaka +3 more | 2019-09-24 |
| 10290521 | Substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipe | Yoshiteru Fukutomi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2019-05-14 |
| 9703199 | Substrate processing apparatus | Toru Asano, Yukio Toriyama, Takashi Taguchi | 2017-07-11 |
| 9687874 | Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units | Hiroyuki Ogura, Yoshiteru Fukutomi, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2017-06-27 |
| 9368383 | Substrate treating apparatus with substrate reordering | Hiroyuki Ogura, Yoshiteru Fukutomi, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2016-06-14 |
| 9299596 | Substrate treating apparatus with parallel substrate treatment lines simultaneously treating a plurality of substrates | Hiroyuki Ogura, Yoshiteru Fukutomi, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2016-03-29 |
| 9230834 | Substrate treating apparatus | Yoshiteru Fukutomi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2016-01-05 |
| 9195140 | Developing apparatus and developing method | Kenji Sugimoto | 2015-11-24 |
| 9184071 | Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units | Hiroyuki Ogura, Yoshiteru Fukutomi, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2015-11-10 |
| 9174235 | Substrate treating apparatus using horizontal treatment cell arrangements with parallel treatment lines | Yoshiteru Fukutomi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2015-11-03 |
| 9165807 | Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units | Yoshiteru Fukutomi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2015-10-20 |
| 9063429 | Negative developing method and negative developing apparatus | Tadashi Miyagi, Takehiro Wajiki | 2015-06-23 |
| 8851008 | Parallel substrate treatment for a plurality of substrate treatment lines | Yoshiteru Fukutomi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2014-10-07 |
| 8708587 | Substrate treating apparatus with inter-unit buffers | Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu, Yoshiteru Fukutomi, Hiromichi Nagashima | 2014-04-29 |
| 8585830 | Substrate processing apparatus and substrate processing method | Shuichi Yasuda, Masashi Kanaoka, Koji Kaneyama, Tadashi Miyagi, Kazuhito Shigemori +4 more | 2013-11-19 |
| 8545118 | Substrate treating apparatus with inter-unit buffers | Hiroyuki Ogura, Yoshiteru Fukutomi, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2013-10-01 |
| 8040488 | Substrate processing apparatus | Shuichi Yasuda, Masashi Kanaoka, Koji Kaneyama, Tadashi Miyagi, Kazuhito Shigemori +4 more | 2011-10-18 |
| 7922405 | Developing apparatus and developing method | Kenji Sugimoto | 2011-04-12 |
| 7105074 | Substrate treating method and apparatus | Osamu Tamada, Minobu Matsunaga, Katsushi Yoshioka, Kenji Sugimoto, Kaoru Aoki +5 more | 2006-09-12 |
| 6963789 | Substrate processing apparatus control system and substrate processing apparatus | Tamihiro Bun, Kinya Murata, Kenji Hashinoki, Kenji Kamei, Noriaki Yokono +1 more | 2005-11-08 |
| 6893171 | Substrate treating apparatus | Yoshiteru Fukutomi, Kenji Sugimoto, Takashi Ito, Takeo Okamoto, Yukihiko Inagaki +1 more | 2005-05-17 |
| 6832863 | Substrate treating apparatus and method | Kenji Sugimoto, Minobu Matsunaga, Masakazu Sanada, Katsushi Yoshioka, Kaoru Aoki +4 more | 2004-12-21 |
| 6649338 | Silver salt photothermographic imaging material | — | 2003-11-18 |