Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11400480 | Substrate processing apparatus and substrate processing method | Tadashi Miyagi, Tsuyoshi Mitsuhashi | 2022-08-02 |
| 9937520 | Substrate treating method | Masashi Kanaoka, Shinichi Takada | 2018-04-10 |
| 9063429 | Negative developing method and negative developing apparatus | Tadashi Miyagi, Tsuyoshi Mitsuhashi | 2015-06-23 |