Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12123848 | Current measurement method | Masateru Taniguchi, Takahito Ohshiro, Masakazu Sanada | 2024-10-22 |
| 11400480 | Substrate processing apparatus and substrate processing method | Takehiro Wajiki, Tsuyoshi Mitsuhashi | 2022-08-02 |
| 10684548 | Developing method | Yuji Tanaka, Masahiko Harumoto, Koji Kaneyama | 2020-06-16 |
| 10236200 | Exposure device and substrate processing apparatus | Koji Nishi, Toru Momma | 2019-03-19 |
| 10185219 | Developing method | Yuji Tanaka, Masahiko Harumoto, Koji Kaneyama | 2019-01-22 |
| 10134610 | Substrate processing method for drying a substrate by discharging gas to liquid layer on the substrate while rotating the substrate | Masashi Kanaoka, Kazuhito Shigemori, Shuichi Yasuda, Masakazu Sanada | 2018-11-20 |
| 10047441 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Yukihiko Inagaki, Koji Kaneyama | 2018-08-14 |
| 10042262 | Negative developing method and negative developing apparatus | Koji Kaneyama | 2018-08-07 |
| 9972516 | Exposure device, substrate processing apparatus, exposure method for substrate and substrate processing method | Koji Nishi, Toru Momma | 2018-05-15 |
| 9828676 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Yukihiko Inagaki, Koji Kaneyama | 2017-11-28 |
| 9477162 | Substrate processing method | Koji Kaneyama, Masashi Kanaoka, Kazuhito Shigemori, Shuichi Yasuda, Tetsuya Hamada | 2016-10-25 |
| 9375748 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Yukihiko Inagaki, Koji Kaneyama | 2016-06-28 |
| 9063429 | Negative developing method and negative developing apparatus | Tsuyoshi Mitsuhashi, Takehiro Wajiki | 2015-06-23 |
| 9028621 | Substrate cleaning method and substrate cleaning device | Masahiko Harumoto, Sadayasu SUYAMA | 2015-05-12 |
| 8932672 | Substrate processing apparatus | Koji Kaneyama, Masashi Kanaoka, Kazuhito Shigemori, Shuichi Yasuda, Tetsuya Hamada | 2015-01-13 |
| 8894775 | Substrate processing apparatus and substrate processing method | Masashi Kanaoka, Kazuhito Shigemori, Shuichi Yasuda, Masakazu Sanada | 2014-11-25 |
| 8585830 | Substrate processing apparatus and substrate processing method | Shuichi Yasuda, Masashi Kanaoka, Koji Kaneyama, Kazuhito Shigemori, Toru Asano +4 more | 2013-11-19 |
| 8540824 | Substrate processing method | Koji Kaneyama, Masashi Kanaoka, Kazuhito Shigemori, Shuichi Yasuda | 2013-09-24 |
| 8496761 | Substrate processing apparatus and substrate processing method | Koji Kaneyama, Akihiro Hisai, Toru Asano, Hiroshi Kobayashi, Tsuyoshi Okumura +3 more | 2013-07-30 |
| 8356424 | Substrate processing method | Koji Kaneyama, Kazuhito Shigemori, Masashi Kanaoka, Shuichi Yasuda | 2013-01-22 |
| 8286576 | Substrate processing apparatus | Osamu Tamada, Masakazu Sanada | 2012-10-16 |
| 8218124 | Substrate processing apparatus with multi-speed drying having rinse liquid supplier that moves from center of rotated substrate to its periphery and stops temporarily so that a drying core can form | Masashi Kanaoka, Kazuhito Shigemori, Shuichi Yasuda, Masakazu Sanada | 2012-07-10 |
| 8040488 | Substrate processing apparatus | Shuichi Yasuda, Masashi Kanaoka, Koji Kaneyama, Kazuhito Shigemori, Toru Asano +4 more | 2011-10-18 |
| 8034190 | Substrate processing apparatus and substrate processing method | Shuichi Yasuda, Masashi Kanaoka, Koji Kaneyama, Kasuhito Shigemori, Toru Asano +3 more | 2011-10-11 |
| 7604424 | Substrate processing apparatus | Kazuhito Shigemori, Koji Kaneyama, Akiko Harumoto, Masashi Kanaoka, Shuichi Yasuda | 2009-10-20 |