Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12328145 | Optical transmitter and control method of tunable optical filter | Takeyasu Tomioka | 2025-06-10 |
| 12211708 | Substrate processing apparatus and substrate processing method | Kenji Kobayashi | 2025-01-28 |
| 11901173 | Substrate processing method | Yukifumi YOSHIDA, Manabu OKUTANI, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2024-02-13 |
| 11881417 | Substrate processing apparatus and substrate processing method | Kenji Kobayashi | 2024-01-23 |
| 11823921 | Substrate processing device and substrate processing method | Michinori IWAO, Kazuhiro Fujita, Noriyuki KIKUMOTO, Takahiro Yamaguchi | 2023-11-21 |
| 11404292 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Hiroshi Abe, Yasunori Kanematsu, Hitoshi Nakai | 2022-08-02 |
| 11387910 | Optical module, transmission device, and operating point control method | Tamotsu Akashi | 2022-07-12 |
| 11260431 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2022-03-01 |
| 11211241 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2021-12-28 |
| 11101147 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Hiroaki Takahashi, Masayuki OTSUJI, Manabu OKUTANI, Chikara MAEDA +2 more | 2021-08-24 |
| 10933448 | Substrate treatment apparatus and substrate treatment method | Michinori IWAO, Noriyuki KIKUMOTO, Mitsutoshi SASAKI | 2021-03-02 |
| 10861717 | Substrate processing apparatus, processing liquid draining method, processing liquid replacing method, and substrate processing method | Michinori IWAO, Noriyuki KIKUMOTO | 2020-12-08 |
| 10792712 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2020-10-06 |
| 10741422 | Substrate processing device and substrate processing method | Michinori IWAO, Noriyuki KIKUMOTO, Kazuhiro Fujita, Mizuki Osawa, Hiroshi EBISUI | 2020-08-11 |
| 10670809 | Optical transmission device and control method | — | 2020-06-02 |
| 10636682 | Substrate processing apparatus | Noriyuki KIKUMOTO, Masahiro Kimura, Kazuhiro Fujita | 2020-04-28 |
| 10623107 | Optical transmission device and method for controlling optical transmission device | Takeyasu Tomioka | 2020-04-14 |
| 10553422 | Substrate treatment method of treating substrate, and substrate treatment apparatus | Noriyuki KIKUMOTO, Kazuhiro Fujita, Michinori IWAO | 2020-02-04 |
| 10134610 | Substrate processing method for drying a substrate by discharging gas to liquid layer on the substrate while rotating the substrate | Tadashi Miyagi, Masashi Kanaoka, Kazuhito Shigemori, Masakazu Sanada | 2018-11-20 |
| 10044439 | Optical receiver that receives polarization multiplexed optical signal | Masayuki Kurisu | 2018-08-07 |
| 9687886 | Substrate processing apparatus | Tomohiro Goto, Masakazu Sanada, Kazuhito Shigemori, Osamu Tamada | 2017-06-27 |
| 9647753 | Coherent optical receiver | Masayuki Kurisu, Takeyasu Tomioka | 2017-05-09 |
| 9477162 | Substrate processing method | Koji Kaneyama, Masashi Kanaoka, Tadashi Miyagi, Kazuhito Shigemori, Tetsuya Hamada | 2016-10-25 |
| 9059221 | Substrate processing method and substrate processing apparatus | Tomohiro Goto, Masakazu Sanada, Kazuhito Shigemori, Osamu Tamada | 2015-06-16 |
| 9020363 | Optical transmitter | — | 2015-04-28 |