Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400868 | Substrate processing method and substrate processing apparatus | Takashi Akiyama, Tomohiro Takahashi | 2025-08-26 |
| 11699601 | Substrate processing method | Tomohiro Takahashi, Kei TAKECHI, Takashi Akiyama | 2023-07-11 |
| 10933448 | Substrate treatment apparatus and substrate treatment method | Shuichi Yasuda, Michinori IWAO, Noriyuki KIKUMOTO | 2021-03-02 |