Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12308258 | Substrate processing apparatus and substrate processing method | Tomohiro Takahashi, Takuya Kishida, Masayuki ORISAKA | 2025-05-20 |
| 11699601 | Substrate processing method | Tomohiro Takahashi, Mitsutoshi SASAKI, Takashi Akiyama | 2023-07-11 |
| 11164750 | Substrate processing device and substrate processing method | Tomohiro Takahashi | 2021-11-02 |
| 10559480 | Substrate treatment apparatus and substrate treatment method | Koji Kurasaki, Kenji Edamitsu, Masaharu Sato, Takeshi Matsumura | 2020-02-11 |