Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334366 | Substrate processing apparatus and substrate processing method | Sei NEGORO | 2025-06-17 |
| 12308258 | Substrate processing apparatus and substrate processing method | Tomohiro Takahashi, Takuya Kishida, Kei TAKECHI | 2025-05-20 |
| 12159784 | Substrate processing apparatus and substrate processing method | Yuji Yamaguchi, Saki MIYAGAWA | 2024-12-03 |
| 11715649 | Substrate processing apparatus | Noritake SUMI | 2023-08-01 |
| 11621174 | Substrate processing apparatus | Noritake SUMI, Masanobu Sato, Daiki UEHARA | 2023-04-04 |
| 11587803 | Substrate processing apparatus | Noritake SUMI, Masanobu Sato, Daiki UEHARA | 2023-02-21 |