Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374541 | Substrate processing apparatus and substrate processing method | Kei Suzuki, Tomohiro MOTONO, Koji Ando | 2025-07-29 |
| 11955350 | Substrate processing apparatus | — | 2024-04-09 |
| 11715649 | Substrate processing apparatus | Masayuki ORISAKA | 2023-08-01 |
| 11658054 | Substrate processing apparatus and substrate processing system | — | 2023-05-23 |
| 11621174 | Substrate processing apparatus | Masanobu Sato, Masayuki ORISAKA, Daiki UEHARA | 2023-04-04 |
| 11587803 | Substrate processing apparatus | Masanobu Sato, Masayuki ORISAKA, Daiki UEHARA | 2023-02-21 |
| 11410865 | Substrate processing apparatus | Hiroyuki Kawahara, Koji Hashimoto, Noriyuki KIKUMOTO | 2022-08-09 |