Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374541 | Substrate processing apparatus and substrate processing method | Kei Suzuki, Noritake SUMI, Koji Ando | 2025-07-29 |
| 11281108 | Exposure device | You Arisawa, Masaya Asai, Masahiko Harumoto, Yuji Tanaka, Chisayo Mori +1 more | 2022-03-22 |